JPH0534106Y2 - - Google Patents
Info
- Publication number
- JPH0534106Y2 JPH0534106Y2 JP5701486U JP5701486U JPH0534106Y2 JP H0534106 Y2 JPH0534106 Y2 JP H0534106Y2 JP 5701486 U JP5701486 U JP 5701486U JP 5701486 U JP5701486 U JP 5701486U JP H0534106 Y2 JPH0534106 Y2 JP H0534106Y2
- Authority
- JP
- Japan
- Prior art keywords
- pattern
- pitch
- index
- caliper
- matching
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000004065 semiconductor Substances 0.000 claims description 8
- 239000003550 marker Substances 0.000 claims description 4
- 238000000034 method Methods 0.000 description 14
- 238000010586 diagram Methods 0.000 description 3
- 238000009792 diffusion process Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000000206 photolithography Methods 0.000 description 3
- 238000001312 dry etching Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
Landscapes
- Length-Measuring Instruments Using Mechanical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5701486U JPH0534106Y2 (en]) | 1986-04-15 | 1986-04-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5701486U JPH0534106Y2 (en]) | 1986-04-15 | 1986-04-15 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62168642U JPS62168642U (en]) | 1987-10-26 |
| JPH0534106Y2 true JPH0534106Y2 (en]) | 1993-08-30 |
Family
ID=30886337
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5701486U Expired - Lifetime JPH0534106Y2 (en]) | 1986-04-15 | 1986-04-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0534106Y2 (en]) |
-
1986
- 1986-04-15 JP JP5701486U patent/JPH0534106Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62168642U (en]) | 1987-10-26 |
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